A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers

RH Poelma, H Sadeghian Marnani, SPM Noijen, JJM Zaal, GQ Zhang

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-11
Number of pages	11
Journal	Journal of Micromechanics and Microengineering
Volume	21
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/21/6/065003
Publication status	Published - 2011

Keywords

@article{0755338d7d0741b988225a6314adcd66,

title = "A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "RH Poelma and {Sadeghian Marnani}, H and SPM Noijen and JJM Zaal and GQ Zhang",

year = "2011",

doi = "10.1088/0960-1317/21/6/065003",

language = "English",

volume = "21",

pages = "1--11",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "6",

}

TY - JOUR

T1 - A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers

AU - Poelma, RH

AU - Sadeghian Marnani, H

AU - Noijen, SPM

AU - Zaal, JJM

AU - Zhang, GQ

PY - 2011

Y1 - 2011

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1088/0960-1317/21/6/065003

DO - 10.1088/0960-1317/21/6/065003

M3 - Article

SN - 0960-1317

VL - 21

SP - 1

EP - 11

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 6

ER -