The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO2 concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO2 sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry [1]. Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO2 is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this approach requires the detection of very small changes in TC (0.25 ppm per ppm CO2 [3]).

Original languageEnglish
Title of host publication2018 IEEE International Solid-State Circuits Conference, ISSCC 2018
Subtitle of host publicationDigest of Technical Papers
EditorsL.C. Fujino
Place of PublicationLewiston, USA
PublisherIEEE
Pages332-334
Number of pages3
Volume61
ISBN (Electronic)978-1-5090-4940-0
ISBN (Print)978-1-5386-2227-8
DOIs
Publication statusPublished - 2018
Event65th IEEE International Solid-State Circuits Conference, ISSCC 2018 - San Francisco, United States
Duration: 11 Feb 201815 Feb 2018

Conference

Conference65th IEEE International Solid-State Circuits Conference, ISSCC 2018
CountryUnited States
CitySan Francisco
Period11/02/1815/02/18

    Research areas

  • Semiconductor device measurement, Temperature measurement, Wires, Transducers, Temperature sensors

ID: 45470682