A phase-domain readout circuit for a CMOS-compatible thermal-conductivity-based carbon dioxide sensor

Zeyu Cai; Robert van Veldhoven; Hilco Suy; Ger De Graaf; Kofi A.A. Makinwa; Michiel Pertijs

doi:10.1109/ISSCC.2018.8310319

A phase-domain readout circuit for a CMOS-compatible thermal-conductivity-based carbon dioxide sensor

Zeyu Cai, Robert van Veldhoven, Hilco Suy, Ger De Graaf, Kofi A.A. Makinwa, Michiel Pertijs

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

20 Downloads (Pure)

Abstract

The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO₂ concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO₂ sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry [1]. Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO₂ is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this approach requires the detection of very small changes in TC (0.25 ppm per ppm CO2 [3]).

Original language	English
Title of host publication	2018 IEEE International Solid-State Circuits Conference, ISSCC 2018
Subtitle of host publication	Digest of Technical Papers
Editors	L.C. Fujino
Place of Publication	Lewiston, USA
Publisher	IEEE
Pages	332-334
Number of pages	3
Volume	61
ISBN (Electronic)	978-1-5090-4940-0
ISBN (Print)	978-1-5386-2227-8
DOIs	https://doi.org/10.1109/ISSCC.2018.8310319
Publication status	Published - 2018
Event	65th IEEE International Solid-State Circuits Conference, ISSCC 2018 - San Francisco, United States Duration: 11 Feb 2018 → 15 Feb 2018

Conference

Conference	65th IEEE International Solid-State Circuits Conference, ISSCC 2018
Country/Territory	United States
City	San Francisco
Period	11/02/18 → 15/02/18

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Semiconductor device measurement
Temperature measurement
Wires
Transducers
Temperature sensors

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10.1109/ISSCC.2018.8310319

08310319Final published version, 659 KB

Cite this

Cai, Z., van Veldhoven, R., Suy, H., De Graaf, G., Makinwa, K. A. A., & Pertijs, M. (2018). A phase-domain readout circuit for a CMOS-compatible thermal-conductivity-based carbon dioxide sensor. In L. C. Fujino (Ed.), 2018 IEEE International Solid-State Circuits Conference, ISSCC 2018: Digest of Technical Papers (Vol. 61, pp. 332-334). IEEE. https://doi.org/10.1109/ISSCC.2018.8310319

@inproceedings{e2dfe1a5869247399eb2a698cfda7b32,

title = "A phase-domain readout circuit for a CMOS-compatible thermal-conductivity-based carbon dioxide sensor",

abstract = "The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO2 concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO2 sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry [1]. Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO2 is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this approach requires the detection of very small changes in TC (0.25 ppm per ppm CO2 [3]).",

keywords = "Semiconductor device measurement, Temperature measurement, Wires, Transducers, Temperature sensors",

author = "Zeyu Cai and {van Veldhoven}, Robert and Hilco Suy and {De Graaf}, Ger and Makinwa, {Kofi A.A.} and Michiel Pertijs",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 65th IEEE International Solid-State Circuits Conference, ISSCC 2018 ; Conference date: 11-02-2018 Through 15-02-2018",

year = "2018",

doi = "10.1109/ISSCC.2018.8310319",

language = "English",

isbn = "978-1-5386-2227-8 ",

volume = "61",

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Cai, Z, van Veldhoven, R, Suy, H, De Graaf, G , Makinwa, KAA & Pertijs, M 2018, A phase-domain readout circuit for a CMOS-compatible thermal-conductivity-based carbon dioxide sensor. in LC Fujino (ed.), 2018 IEEE International Solid-State Circuits Conference, ISSCC 2018: Digest of Technical Papers. vol. 61, IEEE, Lewiston, USA, pp. 332-334, 65th IEEE International Solid-State Circuits Conference, ISSCC 2018, San Francisco, United States, 11/02/18. https://doi.org/10.1109/ISSCC.2018.8310319

A phase-domain readout circuit for a CMOS-compatible thermal-conductivity-based carbon dioxide sensor. / Cai, Zeyu; van Veldhoven, Robert; Suy, Hilco et al.
2018 IEEE International Solid-State Circuits Conference, ISSCC 2018: Digest of Technical Papers. ed. / L.C. Fujino. Vol. 61 Lewiston, USA: IEEE, 2018. p. 332-334.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Pertijs, Michiel

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2018

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N2 - The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO2 concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO2 sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry [1]. Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO2 is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this approach requires the detection of very small changes in TC (0.25 ppm per ppm CO2 [3]).

AB - The measurement of carbon-dioxide (CO2) concentration is very important in home and building automation, e.g. to control ventilation in energy-efficient buildings. This application requires compact, low-cost sensors that can measure CO2 concentration with a resolution of <200 ppm over a 2500ppm range. Conventional optical (NDIR-based) CO2 sensors require components that are CMOS-incompatible, difficult to miniaturize and power-hungry [1]. Due to their CMOS compatibility, thermal-conductivity-based sensors are an attractive alternative [2,3]. They exploit the fact that the thermal conductivity (TC) of CO2 is lower than that of the other constituents of air, so that CO2 concentration can be indirectly measured via the heat loss of a hot wire to ambient. However, this approach requires the detection of very small changes in TC (0.25 ppm per ppm CO2 [3]).

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BT - 2018 IEEE International Solid-State Circuits Conference, ISSCC 2018

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PB - IEEE

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Y2 - 11 February 2018 through 15 February 2018

ER -

A phase-domain readout circuit for a CMOS-compatible thermal-conductivity-based carbon dioxide sensor

Abstract

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Keywords

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