| Original language | English |
|---|---|
| Title of host publication | Annual meeting, ASPE |
| Pages | 26-31 |
| Number of pages | 6 |
| Publication status | Published - 1996 |
A Piezo-driven TEM-stage with subnanometer position stability Proceedings American Society for Precision Engineering
H van der Wulp, HF van Beek, BM Mertens
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific