Abstract
Temperature sensors are often used for the temperature compensation of frequency references [1-5]. High resolution and energy efficiency are then critical requirements, the former to minimize jitter and the latter to minimize power dissipation in a given conversion time. A MEMS-resonator-based sensor meets both criteria [1], but requires two resonators. In principle, resistor-based sensors also meet these criteria, and are CMOS compatible, but previous designs have been limited by the power dissipation [2-4] or 1/f noise [6] of their readout electronics. This paper describes a CMOS temperature sensor that digitizes the temperature-dependent phase shift of an RC filter. It achieves 410μKrms resolution in a 5ms conversion time, while consuming only 160μW. This corresponds to a resolution FOM of 0.13pJ·K2, a 5× improvement on previous CMOS sensors [6].
Original language | English |
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Title of host publication | 2017 IEEE International Solid-State Circuits Conference, ISSCC 2017 |
Subtitle of host publication | Digest of Technical Papers |
Editors | Laura C. Fujino |
Place of Publication | Danvers, MA |
Publisher | IEEE |
Pages | 158-160 |
Number of pages | 3 |
ISBN (Electronic) | 978-1-5090-3758-2 |
ISBN (Print) | 978-1-5090-3757-5 |
DOIs | |
Publication status | Published - 1 Feb 2017 |
Event | ISSCC 2017: 64th IEEE International Solid-State Circuits Conference - San Francisco, CA, United States Duration: 5 Feb 2017 → 9 Feb 2017 |
Conference
Conference | ISSCC 2017 |
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Country/Territory | United States |
City | San Francisco, CA |
Period | 5/02/17 → 9/02/17 |
Bibliographical note
Session 9, Sensors 9.1Keywords
- Temperature sensors
- Bridge circuits
- Resistors
- 1/f noise
- Energy resolution
- Sensor systems