A sampling problem from lithography for chip layout

EA Cator; TJ Dijkema; M Hochstenbach; W Mulckhuyse; MA Peletier; G Prokert; W Weij; D Worm

A sampling problem from lithography for chip layout

EA Cator, TJ Dijkema, M Hochstenbach, W Mulckhuyse, MA Peletier, G Prokert, W Weij, D Worm

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the Fifty-Eighth European Study Group Mathematics with Industry
Editors	RH Bisseling, K Dajani, TJ Dijkema, J van de Leur, PA Zegeling
Place of Publication	Amsterdam
Publisher	Centrum Wiskunde & Informatica
Pages	45-53
Number of pages	9
Publication status	Published - 2007
Event	ESGI58/SWI2007 - Amsterdam Duration: 29 Jan 2007 → 2 Feb 2007

Publication series

Name
Publisher	CWI

Conference

Conference	ESGI58/SWI2007
Period	29/01/07 → 2/02/07

Bibliographical note

NEO

Keywords

Wiskunde en Informatica
Techniek
technische Wiskunde en Informatica
Conf.proc. > 3 pag

Cite this

Cator, EA., Dijkema, TJ., Hochstenbach, M., Mulckhuyse, W., Peletier, MA., Prokert, G., Weij, W., & Worm, D. (2007). A sampling problem from lithography for chip layout. In RH. Bisseling, K. Dajani, TJ. Dijkema, J. van de Leur, & PA. Zegeling (Eds.), Proceedings of the Fifty-Eighth European Study Group Mathematics with Industry (pp. 45-53). Centrum Wiskunde & Informatica.

@inproceedings{1aeadf68fd6c48ba95f2fcb78f20d846,

title = "A sampling problem from lithography for chip layout",

keywords = "Wiskunde en Informatica, Techniek, technische Wiskunde en Informatica, Conf.proc. > 3 pag",

author = "EA Cator and TJ Dijkema and M Hochstenbach and W Mulckhuyse and MA Peletier and G Prokert and W Weij and D Worm",

note = "NEO; ESGI58/SWI2007 ; Conference date: 29-01-2007 Through 02-02-2007",

year = "2007",

language = "Undefined/Unknown",

publisher = "Centrum Wiskunde & Informatica",

pages = "45--53",

editor = "RH Bisseling and K Dajani and TJ Dijkema and {van de Leur}, J and PA Zegeling",

booktitle = "Proceedings of the Fifty-Eighth European Study Group Mathematics with Industry",

}

Cator, EA, Dijkema, TJ, Hochstenbach, M, Mulckhuyse, W, Peletier, MA, Prokert, G, Weij, W & Worm, D 2007, A sampling problem from lithography for chip layout. in RH Bisseling, K Dajani, TJ Dijkema, J van de Leur & PA Zegeling (eds), Proceedings of the Fifty-Eighth European Study Group Mathematics with Industry. Centrum Wiskunde & Informatica, Amsterdam, pp. 45-53, ESGI58/SWI2007, 29/01/07.

A sampling problem from lithography for chip layout. / Cator, EA; Dijkema, TJ; Hochstenbach, M et al.
Proceedings of the Fifty-Eighth European Study Group Mathematics with Industry. ed. / RH Bisseling; K Dajani; TJ Dijkema; J van de Leur; PA Zegeling. Amsterdam: Centrum Wiskunde & Informatica, 2007. p. 45-53.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - A sampling problem from lithography for chip layout

AU - Cator, EA

AU - Dijkema, TJ

AU - Hochstenbach, M

AU - Mulckhuyse, W

AU - Peletier, MA

AU - Prokert, G

AU - Weij, W

AU - Worm, D

N1 - NEO

PY - 2007

Y1 - 2007

KW - Wiskunde en Informatica

KW - Techniek

KW - technische Wiskunde en Informatica

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 45

EP - 53

BT - Proceedings of the Fifty-Eighth European Study Group Mathematics with Industry

A2 - Bisseling, RH

A2 - Dajani, K

A2 - Dijkema, TJ

A2 - van de Leur, J

A2 - Zegeling, PA

PB - Centrum Wiskunde & Informatica

CY - Amsterdam

T2 - ESGI58/SWI2007

Y2 - 29 January 2007 through 2 February 2007

ER -