A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM

B Morana; F Santagata; L Mele; M Mihailovic; G Pandraud; JF Creemer; PM Sarro

doi:10.1109/MEMSYS.2011.5734441

A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM

B Morana, F Santagata, L Mele, M Mihailovic, G Pandraud, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

20 Citations (Scopus)

Original language	English
Title of host publication	24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)
Editors	K Böhringer, L Lin
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Society
Pages	380-383
Number of pages	4
ISBN (Print)	978-1-4244-9634-1
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734441
Publication status	Published - 2011
Event	24th IEEE International Conference MEMS 2011 - Piscataway, NJ, USA Duration: 23 Jan 2011 → 27 Jan 2011

Publication series

Name
Publisher	IEEE

Conference

Conference	24th IEEE International Conference MEMS 2011
Period	23/01/11 → 27/01/11

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Access to Document

10.1109/MEMSYS.2011.5734441

Cite this

Morana, B., Santagata, F., Mele, L., Mihailovic, M., Pandraud, G., Creemer, JF., & Sarro, PM. (2011). A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM. In K. Böhringer, & L. Lin (Eds.), 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011) (pp. 380-383). IEEE Society. https://doi.org/10.1109/MEMSYS.2011.5734441

@inproceedings{20b3498fdd4b43fd86ae7029ccd7896c,

title = "A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "B Morana and F Santagata and L Mele and M Mihailovic and G Pandraud and JF Creemer and PM Sarro",

year = "2011",

doi = "10.1109/MEMSYS.2011.5734441",

language = "English",

isbn = "978-1-4244-9634-1",

publisher = "IEEE Society",

pages = "380--383",

editor = "K B{\"o}hringer and L Lin",

booktitle = "24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)",

note = "24th IEEE International Conference MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

}

Morana, B, Santagata, F, Mele, L, Mihailovic, M, Pandraud, G, Creemer, JF & Sarro, PM 2011, A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM. in K Böhringer & L Lin (eds), 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE Society, Piscataway, NJ, USA, pp. 380-383, 24th IEEE International Conference MEMS 2011, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734441

A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM. / Morana, B; Santagata, F; Mele, L et al.
24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011). ed. / K Böhringer; L Lin. Piscataway, NJ, USA: IEEE Society, 2011. p. 380-383.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM

AU - Morana, B

AU - Santagata, F

AU - Mele, L

AU - Mihailovic, M

AU - Pandraud, G

AU - Creemer, JF

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

U2 - 10.1109/MEMSYS.2011.5734441

DO - 10.1109/MEMSYS.2011.5734441

M3 - Conference contribution

SN - 978-1-4244-9634-1

SP - 380

EP - 383

BT - 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)

A2 - Böhringer, K

A2 - Lin, L

PB - IEEE Society

CY - Piscataway, NJ, USA

T2 - 24th IEEE International Conference MEMS 2011

Y2 - 23 January 2011 through 27 January 2011

ER -