Original languageEnglish
Awarding Institution
Supervisors/Advisors
Award date10 Jan 2019
Print ISBNs978-94-028-1350-0
DOIs
Publication statusPublished - 2019

    Research areas

  • MOEMS, system integration, OCT imaging, electrothermal actuators, Al-SiOx bimorph beams, Si microlenses, Si photonics

ID: 48110535