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A self-referenced VCO-based temperature sensor with reduced supply sensitivity is presented. The proposed sensor converts temperature information to frequency and then into digital bits. A novel sensing technique is proposed in which temperature information is acquired by evaluating the ratio of the output frequencies of two ring oscillators, designed to have different temperature sensitivities, thus avoiding the need for an external frequency reference. Reduced supply sensitivity is achieved by employing the voltage dependence of junction capacitance, thus avoiding the overhead of a voltage regulator. Fabricated in a 65 nm CMOS process, the prototype can operate with supply voltages ranging from 0.85 V to 1.1 V. It achieves supply sensitivity of 0.034 °C/mV and an inaccuracy of ±0.9 °C and ±2.3 °C from 0 to 100 °C after 2-point calibration, with and without static nonlinearity correction, respectively. The proposed sensor achieves 0.3 °C resolution, and a resolution FoM of 0.3 nJK2. The prototype occupies a die area of 0.004 mm2.
Original languageEnglish
Pages (from-to)2651-2663
Number of pages13
JournalIEEE Journal of Solid State Circuits
Volume51
Issue number11
DOIs
Publication statusPublished - 8 Sep 2016

    Research areas

  • VCO based, CMOS based, DRAM, highly digital, processor, sensor, temperature, temperature sensor

ID: 11342063