Abstract
In this paper we present, for the first time, the successful monolithic wafer-scale integration of CVD graphene with CMOS logic for highly miniaturized smart sensing structures with on-chip readout electronics. The use of a patterned CMOS compatible catalyst for pre-defined regions of CVD graphene growth, and the transfer-free process used, allows the direct implementation of patterned graphene structures between the front-end-of-line (FEOL) and back-end-of-line (BEOL) processes. No significant deterioration of the graphene properties and of the CMOS logic gate performance due to the high temperature graphene growth step was observed. This is a significant leap towards industrial production of graphene-based smart MEMS/NEMS sensors.
Original language | English |
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Title of host publication | 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) |
Place of Publication | Piscataway |
Publisher | IEEE |
Pages | 260-263 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-7281-1610-5 |
ISBN (Print) | 978-1-7281-1611-2 |
DOIs | |
Publication status | Published - 2019 |
Event | 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019 |
Conference
Conference | 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 |
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Country/Territory | Korea, Republic of |
City | Seoul |
Period | 27/01/19 → 31/01/19 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.