In this paper we present, for the first time, the successful monolithic wafer-scale integration of CVD graphene with CMOS logic for highly miniaturized smart sensing structures with on-chip readout electronics. The use of a patterned CMOS compatible catalyst for pre-defined regions of CVD graphene growth, and the transfer-free process used, allows the direct implementation of patterned graphene structures between the front-end-of-line (FEOL) and back-end-of-line (BEOL) processes. No significant deterioration of the graphene properties and of the CMOS logic gate performance due to the high temperature graphene growth step was observed. This is a significant leap towards industrial production of graphene-based smart MEMS/NEMS sensors.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway
PublisherIEEE
Pages260-263
Number of pages4
ISBN (Electronic)978-1-7281-1610-5
ISBN (Print)978-1-7281-1611-2
DOIs
Publication statusPublished - 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 27 Jan 201931 Jan 2019

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period27/01/1931/01/19

ID: 66538204