Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation

BW Chui, L Aeschimann, T Akiyama, U Staufer

Research output: Contribution to journalArticleScientific

21 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalReview of Scientific Instruments
Volume78
Publication statusPublished - 2007

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