Aerial image based lens metrology for wafer steppers.

P. Dirksen, JJM Braat, AJEM Janssen, A Leeuwestein, T Matsuyama, T Noda

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	331-341
Number of pages	11
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	6154
Publication status	Published - 2006

Keywords

@article{87237a36fd8d4081a2985c35548247de,

title = "Aerial image based lens metrology for wafer steppers.",

keywords = "Peer-lijst tijdschrift",

author = "P. Dirksen and JJM Braat and AJEM Janssen and A Leeuwestein and T Matsuyama and T Noda",

year = "2006",

language = "Undefined/Unknown",

volume = "6154",

pages = "331--341",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Aerial image based lens metrology for wafer steppers.

AU - Dirksen, P.

AU - Braat, JJM

AU - Janssen, AJEM

AU - Leeuwestein, A

AU - Matsuyama, T

AU - Noda, T

PY - 2006

Y1 - 2006

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 6154

SP - 331

EP - 341

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -