@inproceedings{56e81155af3e45ca83dcba5e66eecef0,
title = "Al contacts to very shallow junctions",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "Q Ren and LK Nanver and CCG Visser and JW Slotboom",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-73461-18-9",
publisher = "STW Technology Foundation",
pages = "719--722",
editor = "{JP Veen}",
booktitle = "SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]",
note = "2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo ; Conference date: 24-11-1999 Through 25-11-1999",
}