Original languageEnglish
Title of host publicationProceedings of the IEEE international conference on micro electro mechanical systems
EditorsGBV Lee, T Tsuchiya
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages484-487
Number of pages4
ISBN (Print)978-146735655-8
DOIs
Publication statusPublished - 2013
EventIEEE MEMS 2013, Taipei, Taiwan - Piscataway, NJ, USA
Duration: 20 Jan 201324 Jan 2013

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE MEMS 2013, Taipei, Taiwan
Period20/01/1324/01/13

ID: 1499403