@inproceedings{c9b987951f064e15880df63406779eea,
title = "Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates",
author = "B Morana and G Fiorentino and G Pandraud and JF Creemer and PM Sarro",
note = "Harvest; IEEE MEMS 2013, Taipei, Taiwan ; Conference date: 20-01-2013 Through 24-01-2013",
year = "2013",
doi = "10.1109/MEMSYS.2013.6474284",
language = "English",
isbn = "978-146735655-8",
publisher = "IEEE Society",
pages = "484--487",
editor = "GBV Lee and T Tsuchiya",
booktitle = "Proceedings of the IEEE international conference on micro electro mechanical systems",
}