Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates

B Morana; G Fiorentino; G Pandraud; JF Creemer; PM Sarro

doi:10.1109/MEMSYS.2013.6474284

Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates

B Morana, G Fiorentino, G Pandraud, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings of the IEEE international conference on micro electro mechanical systems
Editors	GBV Lee, T Tsuchiya
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Society
Pages	484-487
Number of pages	4
ISBN (Print)	978-146735655-8
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474284
Publication status	Published - 2013
Event	IEEE MEMS 2013, Taipei, Taiwan - Piscataway, NJ, USA Duration: 20 Jan 2013 → 24 Jan 2013

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE MEMS 2013, Taipei, Taiwan
Period	20/01/13 → 24/01/13

Bibliographical note

Harvest

Access to Document

10.1109/MEMSYS.2013.6474284

Cite this

@inproceedings{c9b987951f064e15880df63406779eea,

title = "Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates",

author = "B Morana and G Fiorentino and G Pandraud and JF Creemer and PM Sarro",

note = "Harvest; IEEE MEMS 2013, Taipei, Taiwan ; Conference date: 20-01-2013 Through 24-01-2013",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474284",

language = "English",

isbn = "978-146735655-8",

publisher = "IEEE Society",

pages = "484--487",

editor = "GBV Lee and T Tsuchiya",

booktitle = "Proceedings of the IEEE international conference on micro electro mechanical systems",

}

Morana, B, Fiorentino, G, Pandraud, G, Creemer, JF & Sarro, PM 2013, Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates. in GBV Lee & T Tsuchiya (eds), Proceedings of the IEEE international conference on micro electro mechanical systems. IEEE Society, Piscataway, NJ, USA, pp. 484-487, IEEE MEMS 2013, Taipei, Taiwan, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474284

Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates. / Morana, B; Fiorentino, G; Pandraud, G et al.
Proceedings of the IEEE international conference on micro electro mechanical systems. ed. / GBV Lee; T Tsuchiya. Piscataway, NJ, USA: IEEE Society, 2013. p. 484-487.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates

AU - Morana, B

AU - Fiorentino, G

AU - Pandraud, G

AU - Creemer, JF

AU - Sarro, PM

N1 - Harvest

PY - 2013

Y1 - 2013

U2 - 10.1109/MEMSYS.2013.6474284

DO - 10.1109/MEMSYS.2013.6474284

M3 - Conference contribution

SN - 978-146735655-8

SP - 484

EP - 487

BT - Proceedings of the IEEE international conference on micro electro mechanical systems

A2 - Lee, GBV

A2 - Tsuchiya, T

PB - IEEE Society

CY - Piscataway, NJ, USA

T2 - IEEE MEMS 2013, Taipei, Taiwan

Y2 - 20 January 2013 through 24 January 2013

ER -