Abstract
The rapid development and market growth of microelectronics technology continues to provide expanding connectivity, productivity, entertainment and well-being to billions of users globally. Moreover, continuous demand for more on-chip functionally presents an exciting opportunity for integration of various chemical sensors for monitoring pollution of our surrounding environment and exposure to toxic, corrosive or flammable gases.
Original language | English |
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Qualification | Doctor of Philosophy |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 10 Dec 2019 |
Print ISBNs | 978-94-028-1851-2 |
DOIs | |
Publication status | Published - 2019 |
Keywords
- AlGaN/GaN
- HEMT
- gas sensor
- gate recess
- 2DEG
- H2S
- H2