Abstract
We present a silicon carbide (SiC) based surface micromachined nanoreactor for in-situ characterization of reactions between solid nanostructured materials and gasses in transmission electron microscopes (TEMs). For the first time SiC is used as construction material for this device and a novel design of gas-microchannel with a two-level height is implemented. The use of SiC compared to the standard construction materials allows for easier and more reliable fabrication of the complete microsystem and for improved performance in terms of temperature. Additionally, the two-level height channel eases the loading of the specimens without affecting the sensitivity in the gas analysis.
Original language | English |
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Title of host publication | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
Place of Publication | Piscataway |
Publisher | IEEE |
Pages | 753-756 |
Number of pages | 4 |
ISBN (Print) | 978-1-5090-1973-1 |
DOIs | |
Publication status | Published - 2016 |
Event | MEMS 2016: 29th IEEE International Conference on Micro Electro Mechanical Systems - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016 Conference number: 29 |
Conference
Conference | MEMS 2016 |
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Country/Territory | China |
City | Shanghai |
Period | 24/01/16 → 28/01/16 |
Keywords
- Microchannels
- Silicon carbide
- Fabrication
- Etching
- Perfomance evaluation
- Loading
- Resistance