Original languageUndefined/Unknown
Title of host publication24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)
EditorsK Böhringer, L Lin
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1103-1106
Number of pages4
ISBN (Print)978-1-4244-9634-1
DOIs
Publication statusPublished - 2011
EventMEMS 2011 - Piscataway, NJ, USA
Duration: 23 Jan 201127 Jan 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceMEMS 2011
Period23/01/1127/01/11

    Research areas

  • Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag

ID: 3731426