Original language | English |
---|---|
Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Journal of Applied Physics |
Volume | 112 |
Issue number | 11 |
DOIs | |
Publication status | Published - 2012 |
An analytical kinetic model for chemical-vapor deposition of pureB layers from diborane
V Mohammadi, WB De Boer, LK Nanver
Research output: Contribution to journal › Article › Scientific › peer-review
21
Citations
(Scopus)