Analysis of III-V laye stacks on INP substrates using spectroscopic ellipsometry in the NIR spectral range

HG Bukkems, YS Oei, U Richter, B Gruska

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{cd003426a01e435fae5339427f46d8a2,

title = "Analysis of III-V laye stacks on INP substrates using spectroscopic ellipsometry in the NIR spectral range",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "HG Bukkems and YS Oei and U Richter and B Gruska",

year = "2000",

language = "Undefined/Unknown",

volume = "364",

pages = "165--170",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "1",

}