Apparatus and method for irradiating a surface of a sample using charged particle beams

Pieter Kruit (Inventor), Marijke Scotuzzi (Inventor), Cornelis Wouter Hagen (Inventor)

    Research output: Patent

    Original languageEnglish
    IPCH01J
    Priority date30/05/16
    Publication statusPublished - 2017

    Bibliographical note

    Patent: OCT-16-034
    Applicant: TU Delft

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