Standard

Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment. / Pietersma, J; van Gemund, AJC.

Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering. ed. / s.n. s.l. : s.n., 2007. p. 1-12.

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Harvard

Pietersma, J & van Gemund, AJC 2007, Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment. in s.n. (ed.), Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering. s.n., s.l., pp. 1-12.

APA

Pietersma, J., & van Gemund, AJC. (2007). Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment. In s.n. (Ed.), Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering (pp. 1-12). s.n..

Vancouver

Pietersma J, van Gemund AJC. Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment. In s.n., editor, Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering. s.l.: s.n. 2007. p. 1-12

Author

Pietersma, J ; van Gemund, AJC. / Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment. Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering. editor / s.n. s.l. : s.n., 2007. pp. 1-12

BibTeX

@inproceedings{f17d96ee2bcf43a88bf334a83ac31290,
title = "Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment",
keywords = "Wiskunde en Informatica, Techniek, technische Wiskunde en Informatica, Conf.proc. > 3 pag",
author = "J Pietersma and {van Gemund}, AJC",
note = "best student paper",
year = "2007",
language = "Undefined/Unknown",
isbn = "0-9720562-5-4",
publisher = "s.n.",
pages = "1--12",
editor = "s.n.",
booktitle = "Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering",

}

RIS

TY - GEN

T1 - Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment

AU - Pietersma, J

AU - van Gemund, AJC

N1 - best student paper

PY - 2007

Y1 - 2007

KW - Wiskunde en Informatica

KW - Techniek

KW - technische Wiskunde en Informatica

KW - Conf.proc. > 3 pag

UR - https://www.incose.org/ipub/07/p072.pdf

M3 - Conference contribution

SN - 0-9720562-5-4

SP - 1

EP - 12

BT - Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering

A2 - s.n., null

PB - s.n.

CY - s.l.

ER -

ID: 2911544