Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment

J Pietersma, AJC van Gemund

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of INCOSE 2007, 17th International Symposium on Systems Engineering
Editors s.n.
Place of Publications.l.
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Pages1-12
Number of pages12
ISBN (Print)0-9720562-5-4
Publication statusPublished - 2007

Publication series

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Bibliographical note

best student paper

Keywords

  • Wiskunde en Informatica
  • Techniek
  • technische Wiskunde en Informatica
  • Conf.proc. > 3 pag

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