@inproceedings{f17d96ee2bcf43a88bf334a83ac31290,
title = "Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment",
keywords = "Wiskunde en Informatica, Techniek, technische Wiskunde en Informatica, Conf.proc. > 3 pag",
author = "J Pietersma and {van Gemund}, AJC",
note = "best student paper",
year = "2007",
language = "Undefined/Unknown",
isbn = "0-9720562-5-4",
publisher = "s.n.",
pages = "1--12",
editor = "s.n.",
booktitle = "Proceedings of INCOSE 2007, 17th International Symposium on Systems Engineering",
}