@article{b4729261bce04bb98adf8a088e3e8e1d,
title = "Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "JHG Correia and M Bartek and RF Wolffenbuttel",
year = "1999",
language = "Undefined/Unknown",
volume = "76",
pages = "191--196",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",
}