Abstract
This paper discusses the assembly challenges considering the design and manufacturability of a Wafer Level Thin Film Package in MEMS applications. The assembly processes are discussed. The loads associated with these processes are illustrated and evaluated. Numerical calculations are combined with experimental observations in order to estimate the assembly risks. Our results emphasize the need for concurrent design for assembly.
Keywords: MEMS; wafer level thin film package; packaging; resonator
Original language | English |
---|---|
Pages (from-to) | 3989-4001 |
Number of pages | 13 |
Journal | Sensors |
Volume | 10 |
Publication status | Published - 2010 |
Keywords
- academic journal papers
- CWTS JFIS < 0.75