Characterization of thin film MEMS packages

Q Li

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	van Keulen, A., Supervisor Goosen, J.F.L., Advisor Müller, J., Advisor, External person Zhang, G.Q., Advisor Sarro, P.M., Advisor van Beek, JTM, Advisor, External person Staufer, U., Advisor
Award date	3 Dec 2012
Place of Publication	Enschede
Publisher	Ipskamp
Print ISBNs	978-90-7717282-7
Publication status	Published - 2012

Keywords

@phdthesis{32e80cb8501941aba5a2a4ae0158c16e,

title = "Characterization of thin film MEMS packages",

keywords = "authored books, Diss. prom. aan TU Delft",

author = "Q Li",

year = "2012",

language = "English",

isbn = "978-90-7717282-7",

publisher = "Ipskamp",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}