Original languageEnglish
Title of host publicationProceedings - 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems
EditorsF Ayazi, CJ Kim
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages48-51
Number of pages4
ISBN (Print)978-1-4799-3508-6
DOIs
Publication statusPublished - 2014
EventIEEE MEMS 2014, San Francisco, CA, USA - Piscataway, NJ, USA
Duration: 26 Jan 201430 Jan 2014

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE MEMS 2014, San Francisco, CA, USA
Period26/01/1430/01/14

ID: 1397827