@inproceedings{5151dd108ad340a8b99a016139bfe143,
title = "Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "PTJ Gennissen and H Ohji and PJ French and CMA Ashruf and {O Halloran}, GMO and PM Sarro",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-76699-02-X",
publisher = "Delft University of Technology",
pages = "1029--1032",
editor = "{M Bartek}",
booktitle = "Eurosensors XIII: proceedings [CD-ROM]",
address = "Netherlands",
note = "13th European Conference on Solid-State Transducers, The Hague ; Conference date: 12-09-1999 Through 15-09-1999",
}