Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns

XR Jiang, JE Barth, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	3747-3752
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	B14
Issue number	6
Publication status	Published - 1996

Cite this

@article{288944db7686475e934da19b4e5fcf1a,

title = "Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns",

author = "XR Jiang and JE Barth and P Kruit",

year = "1996",

language = "Undefined/Unknown",

volume = "B14",

pages = "3747--3752",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns

AU - Jiang, XR

AU - Barth, JE

AU - Kruit, P

PY - 1996

Y1 - 1996

M3 - Article

SN - 1071-1023

VL - B14

SP - 3747

EP - 3752

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -