Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces

TSY Moh, G Pandraud, LCPM de Smet, C. van Rijn, EJR Sudholter, PM Sarro

Research output: Contribution to conference › Poster › Professional

Original language	English
Publication status	Published - 2011
Event	International Conference on Materials for Advanced Technologies (ICMAT) 2011 - Suntec City, Singapore Duration: 26 Jun 2011 → 1 Jul 2011

Conference	International Conference on Materials for Advanced Technologies (ICMAT) 2011
Period	26/06/11 → 1/07/11

Keywords

@conference{6dc4a352bd3a4fbc973401c2525fd79c,

title = "Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces",

keywords = "Geen BTA classificatie",

author = "TSY Moh and G Pandraud and {de Smet}, LCPM and {van Rijn}, C. and EJR Sudholter and PM Sarro",

year = "2011",

language = "English",

note = "International Conference on Materials for Advanced Technologies (ICMAT) 2011 ; Conference date: 26-06-2011 Through 01-07-2011",

}

TY - CONF

T1 - Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces

AU - Moh, TSY

AU - Pandraud, G

AU - de Smet, LCPM

AU - van Rijn, C.

AU - Sudholter, EJR

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - Geen BTA classificatie

M3 - Poster

T2 - International Conference on Materials for Advanced Technologies (ICMAT) 2011

Y2 - 26 June 2011 through 1 July 2011

ER -