Curvature manipulation of photomasks: Enhancing the imaging performance of immersion lithography equipment

CL Valentin

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Munnig Schmidt, Robert, Supervisor Rixen, Daniel, Advisor
Award date	22 May 2013
Print ISBNs	978-94-6186-128-3
DOIs	https://doi.org/10.4233/uuid:50e258f2-40a9-4048-87a2-e62351dba8ac
Publication status	Published - 2013

NEO

Keywords

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