Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]

J Shi; LK Nanver; K Grimm; CCG Visser

Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]

J Shi, LK Nanver, K Grimm, CCG Visser

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

224 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	CSSP98: proceedings. SAFE98: proceedings [CD-ROM]
Editors	JP Veen
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	515-519
Number of pages	5
ISBN (Print)	90-73461-15-4
Publication status	Published - 1998
Event	ProRISC/IEEE Workshop on on Circuits, Systems and Signal Processing. STW's Workshop on Semiconductor Advances for Future Electronics, Mierlo - Utrecht Duration: 24 Nov 1998 → 25 Nov 1998

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	ProRISC/IEEE Workshop on on Circuits, Systems and Signal Processing. STW's Workshop on Semiconductor Advances for Future Electronics, Mierlo
Period	24/11/98 → 25/11/98

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{6364a966e664456f92a145d92f4c5e44,

title = "Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "J Shi and LK Nanver and K Grimm and CCG Visser",

year = "1998",

language = "Undefined/Unknown",

isbn = "90-73461-15-4",

publisher = "STW Technology Foundation",

pages = "515--519",

editor = "{JP Veen}",

booktitle = "CSSP98: proceedings. SAFE98: proceedings [CD-ROM]",

note = "ProRISC/IEEE Workshop on on Circuits, Systems and Signal Processing. STW's Workshop on Semiconductor Advances for Future Electronics, Mierlo ; Conference date: 24-11-1998 Through 25-11-1998",

}

Shi, J, Nanver, LK, Grimm, K & Visser, CCG 1998, Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]. in JP Veen (ed.), CSSP98: proceedings. SAFE98: proceedings [CD-ROM]. STW Technology Foundation, Utrecht, pp. 515-519, ProRISC/IEEE Workshop on on Circuits, Systems and Signal Processing. STW's Workshop on Semiconductor Advances for Future Electronics, Mierlo, 24/11/98.

Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]. / Shi, J; Nanver, LK; Grimm, K et al.
CSSP98: proceedings. SAFE98: proceedings [CD-ROM]. ed. / JP Veen. Utrecht: STW Technology Foundation, 1998. p. 515-519.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]

AU - Shi, J

AU - Nanver, LK

AU - Grimm, K

AU - Visser, CCG

PY - 1998

Y1 - 1998

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-15-4

SP - 515

EP - 519

BT - CSSP98: proceedings. SAFE98: proceedings [CD-ROM]

A2 - JP Veen, null

PB - STW Technology Foundation

CY - Utrecht

T2 - ProRISC/IEEE Workshop on on Circuits, Systems and Signal Processing. STW's Workshop on Semiconductor Advances for Future Electronics, Mierlo

Y2 - 24 November 1998 through 25 November 1998

ER -