Deposition of magnesium hydride thin films using radio frequency reactive sputtering

C Platzer-Bjorkman, TT Mongstad, JP Maehlen, A Baldi, S Karazhanov, A Holt

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{5db9ac9d5fde49939f02fe52aac36ebd,

title = "Deposition of magnesium hydride thin films using radio frequency reactive sputtering",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "C Platzer-Bjorkman and TT Mongstad and JP Maehlen and A Baldi and S Karazhanov and A Holt",

year = "2011",

language = "English",

volume = "519",

pages = "5949--5954",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}