• C Biasotto
  • AM Daltrini
  • RC Teixeira
  • FA Boscoli
  • JA Diniz
  • SA Moshkalev
  • I Doi
Original languageUndefined/Unknown
Pages (from-to)1166-1170
Number of pages5
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume25
Issue number4
Publication statusPublished - 2007

    Research areas

  • academic journal papers, Geen BTA classificatie

ID: 2889303