@inproceedings{58cefd1af0524ff5963df5dce9f7e2e7,
title = "Deposition of thin film-silicon by thermal CVD processes for application in solar cells.",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "AJMM Zutphen and M Zeman and FD Tichelaar and JW Metselaar",
year = "1998",
language = "Undefined/Unknown",
pages = "1440--1443",
editor = "HA Ossenbrink and P Helm and H Ehmann",
booktitle = "Conference Proceedings of the 14th European Photovoltaic Solar Energy Conference. 14th European Photovoltaic Solar Energy Conference.",
}