Design and characterization of a novel icp plasma tool for high speed and accuracy drie processing

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proc. IEEE MEMS 2008
Editors	O Brand, Y Zohar
Place of Publication	Tucson, Arizona
Publisher	IEEE Society
Pages	311-314
Number of pages	4
ISBN (Print)	987-1-4244-1792-6
Publication status	Published - 2008
Event	IEEE MEMS 2008, Tucson Arizona, USA - Tucson, Arizona Duration: 13 Jan 2008 → 17 Jan 2008

Name
Publisher	IEEE

Conference	IEEE MEMS 2008, Tucson Arizona, USA
Period	13/01/08 → 17/01/08

Keywords

@inproceedings{725cb5bb6d2a4114a4da0432180ce25f,

title = "Design and characterization of a novel icp plasma tool for high speed and accuracy drie processing",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "N Launay and {van Zeijl}, HW and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

isbn = "987-1-4244-1792-6",

publisher = "IEEE Society",

pages = "311--314",

editor = "O Brand and Y Zohar",

booktitle = "Proc. IEEE MEMS 2008",

note = "IEEE MEMS 2008, Tucson Arizona, USA ; Conference date: 13-01-2008 Through 17-01-2008",

}

TY - GEN

T1 - Design and characterization of a novel icp plasma tool for high speed and accuracy drie processing

AU - Launay, N

AU - van Zeijl, HW

AU - Sarro, PM

PY - 2008

Y1 - 2008

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 987-1-4244-1792-6

SP - 311

EP - 314

BT - Proc. IEEE MEMS 2008

A2 - Brand, O

A2 - Zohar, Y

PB - IEEE Society

CY - Tucson, Arizona

T2 - IEEE MEMS 2008, Tucson Arizona, USA

Y2 - 13 January 2008 through 17 January 2008

ER -