For optical waveguide sensing, the challenging problems lie in the coupling efficiency and alignment tolerance [1]. This paper presents two different types of waveguides with tapers for evanescent sensing to relieve these problems. The first waveguide is SiC waveguide with 3D tapered coupler and the other is SU8 standing waveguide with horizontal tapered coupler. The design, simulation and fabrication of both structures will be illustrated.
Original languageEnglish
Title of host publicationSmart Systems Integration 2017
Subtitle of host publicationInternational Conference and Exhibition on Integration Issues of Miniaturized Systems
EditorsT. Otto
PublisherMesago Messe Frankfurt GmbH
Pages282-288
Number of pages7
ISBN (Electronic)978-3-95735-057-2
Publication statusPublished - 2017
EventSSI 2017 Smart Systems Integration : International Conference and Exhibition on Integration Issues of Miniaturized Systems - Cork, Ireland
Duration: 8 Mar 20179 Mar 2017

Conference

ConferenceSSI 2017 Smart Systems Integration
CountryIreland
CityCork
Period8/03/179/03/17

ID: 37137545