Abstract
For optical waveguide sensing, the challenging problems lie in the coupling efficiency and alignment tolerance [1]. This paper presents two different types of waveguides with tapers for evanescent sensing to relieve these problems. The first waveguide is SiC waveguide with 3D tapered coupler and the other is SU8 standing waveguide with horizontal tapered coupler. The design, simulation and fabrication of both structures will be illustrated.
Original language | English |
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Title of host publication | Smart Systems Integration 2017 |
Subtitle of host publication | International Conference and Exhibition on Integration Issues of Miniaturized Systems |
Editors | T. Otto |
Publisher | Mesago Messe Frankfurt GmbH |
Pages | 282-288 |
Number of pages | 7 |
ISBN (Electronic) | 978-3-95735-057-2 |
Publication status | Published - 2017 |
Event | SSI 2017 Smart Systems Integration : International Conference and Exhibition on Integration Issues of Miniaturized Systems - Cork, Ireland Duration: 8 Mar 2017 → 9 Mar 2017 |
Conference
Conference | SSI 2017 Smart Systems Integration |
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Country/Territory | Ireland |
City | Cork |
Period | 8/03/17 → 9/03/17 |