Design and scale-up of chemical vapour deposition reactors for semiconductor processing

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2119-2128
Number of pages	10
Journal	Chemical Engineering Science
Volume	51
Issue number	10
Publication status	Published - 1996

Cite this

@article{8565e05ca7364debb9432e536c9e9c5b,

title = "Design and scale-up of chemical vapour deposition reactors for semiconductor processing",

author = "CR Kleijn and KJ Kuijlaars and {van den Akker}, HEA",

year = "1996",

language = "Undefined/Unknown",

volume = "51",

pages = "2119--2128",

journal = "Chemical Engineering Science",

issn = "0009-2509",

publisher = "Elsevier",

number = "10",

}