Standard

Designing a 100 [aF/nm] capacitive transducer. / Middelburg, L.M.; Mansouri, B. El; Poelma, R.H.; Van Zeijl, H.W.; Wei, J.; Zhang, G.Q.; Van Driel, W.D.

2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. Piscataway, NJ : IEEE, 2018. p. 1-3.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Harvard

Middelburg, LM, Mansouri, BE, Poelma, RH, Van Zeijl, HW, Wei, J, Zhang, GQ & Van Driel, WD 2018, Designing a 100 [aF/nm] capacitive transducer. in 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. IEEE, Piscataway, NJ, pp. 1-3, EuroSimE 2018, Toulouse, France, 15/04/18. https://doi.org/10.1109/EuroSimE.2018.8369954

APA

Middelburg, L. M., Mansouri, B. E., Poelma, R. H., Van Zeijl, H. W., Wei, J., Zhang, G. Q., & Van Driel, W. D. (2018). Designing a 100 [aF/nm] capacitive transducer. In 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018 (pp. 1-3). Piscataway, NJ: IEEE. https://doi.org/10.1109/EuroSimE.2018.8369954

Vancouver

Middelburg LM, Mansouri BE, Poelma RH, Van Zeijl HW, Wei J, Zhang GQ et al. Designing a 100 [aF/nm] capacitive transducer. In 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. Piscataway, NJ: IEEE. 2018. p. 1-3 https://doi.org/10.1109/EuroSimE.2018.8369954

Author

Middelburg, L.M. ; Mansouri, B. El ; Poelma, R.H. ; Van Zeijl, H.W. ; Wei, J. ; Zhang, G.Q. ; Van Driel, W.D. / Designing a 100 [aF/nm] capacitive transducer. 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. Piscataway, NJ : IEEE, 2018. pp. 1-3

BibTeX

@inproceedings{87a4bec8209548e8b37bb7f8f0a1f573,
title = "Designing a 100 [aF/nm] capacitive transducer",
abstract = "The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure 1. Maximizing the capacitive sensitivity, results in suppression of noise in the electronics domain. This work focuses on the design and realization of a mechanical to electrical transduction using a capacitive readout scheme. Design considerations and measures are taken to maximize the latter are considered and illustrated using FEM simulations. A capacitive transducer showing a sensitivity of 100 [aF/nm] was designed and realized, by exploiting the large displacement behavior of the inertial sensor which was considered.",
keywords = "Sensitivity, Fingers, Electrodes, Substrates, Mechanical sensors, Mathematical model",
author = "L.M. Middelburg and Mansouri, {B. El} and R.H. Poelma and {Van Zeijl}, H.W. and J. Wei and G.Q. Zhang and {Van Driel}, W.D.",
note = "Accepted author manuscript",
year = "2018",
doi = "10.1109/EuroSimE.2018.8369954",
language = "English",
pages = "1--3",
booktitle = "2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018",
publisher = "IEEE",
address = "United States",

}

RIS

TY - GEN

T1 - Designing a 100 [aF/nm] capacitive transducer

AU - Middelburg, L.M.

AU - Mansouri, B. El

AU - Poelma, R.H.

AU - Van Zeijl, H.W.

AU - Wei, J.

AU - Zhang, G.Q.

AU - Van Driel, W.D.

N1 - Accepted author manuscript

PY - 2018

Y1 - 2018

N2 - The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure 1. Maximizing the capacitive sensitivity, results in suppression of noise in the electronics domain. This work focuses on the design and realization of a mechanical to electrical transduction using a capacitive readout scheme. Design considerations and measures are taken to maximize the latter are considered and illustrated using FEM simulations. A capacitive transducer showing a sensitivity of 100 [aF/nm] was designed and realized, by exploiting the large displacement behavior of the inertial sensor which was considered.

AB - The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure 1. Maximizing the capacitive sensitivity, results in suppression of noise in the electronics domain. This work focuses on the design and realization of a mechanical to electrical transduction using a capacitive readout scheme. Design considerations and measures are taken to maximize the latter are considered and illustrated using FEM simulations. A capacitive transducer showing a sensitivity of 100 [aF/nm] was designed and realized, by exploiting the large displacement behavior of the inertial sensor which was considered.

KW - Sensitivity

KW - Fingers

KW - Electrodes

KW - Substrates

KW - Mechanical sensors

KW - Mathematical model

UR - http://www.scopus.com/inward/record.url?scp=85048878279&partnerID=8YFLogxK

U2 - 10.1109/EuroSimE.2018.8369954

DO - 10.1109/EuroSimE.2018.8369954

M3 - Conference contribution

SP - 1

EP - 3

BT - 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018

PB - IEEE

CY - Piscataway, NJ

ER -

ID: 45595747