Designing lithographic objectives by constructing saddle points.

OE Marinescu, F Bociort

Research output: Contribution to journalConference articleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)63420L-1-63420L7
JournalProceedings of SPIE- International Society for Optical Engineering
Volume6342
Publication statusPublished - 2006

Keywords

  • Peer-lijst tijdschrift

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