Determination of resist parameters using the extended Nijboer-Zernike theory.

P. Dirksen, JJM Braat, AJEM Janssen, A Leeuwestein, H Kwinten, D van Steenwinckel

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	150-159
Number of pages	10
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5377
Publication status	Published - 2004

niet eerder opgenomen

Keywords

@article{0a0e252444fb41519a0ee4ffad449e7b,

title = "Determination of resist parameters using the extended Nijboer-Zernike theory.",

keywords = "professional journal papers, Geen BTA classificatie",

author = "P. Dirksen and JJM Braat and AJEM Janssen and A Leeuwestein and H Kwinten and {van Steenwinckel}, D",

note = "niet eerder opgenomen",

year = "2004",

language = "Undefined/Unknown",

volume = "5377",

pages = "150--159",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Determination of resist parameters using the extended Nijboer-Zernike theory.

AU - Dirksen, P.

AU - Braat, JJM

AU - Janssen, AJEM

AU - Leeuwestein, A

AU - Kwinten, H

AU - van Steenwinckel, D

N1 - niet eerder opgenomen

PY - 2004

Y1 - 2004

KW - professional journal papers

KW - Geen BTA classificatie

M3 - Conference article

SN - 0277-786X

VL - 5377

SP - 150

EP - 159

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -