Developer etched single and arrays of three {100} planes silicon nanowires (SiNWs) FET

TSY Moh, Y Maruyama, G Pandraud, LCPM de Smet, C. van Rijn, EJR Sudholter, PM Sarro

Research output: Contribution to conferencePosterProfessional

Original languageEnglish
Publication statusPublished - 2011
EventSTW SAFE conference - Veldhoven
Duration: 14 Nov 201115 Nov 2011

Conference

ConferenceSTW SAFE conference
Period14/11/1115/11/11

Keywords

  • Geen BTA classificatie

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