Developing MEMS technology: choosing the options to meet requirements

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	PD Mangalgiri, AR Upadhya, A Selvarajan
Place of Publication	New Delhi
Publisher	Allied Publishers
Pages	182-189
Number of pages	8
ISBN (Print)	81-7023-958-3
Publication status	Published - 1999
Event	International Conference on Smart Materials, Structures and Systems, Bangalore, India - New Delhi Duration: 7 Jul 1999 → 10 Jul 1999

Name
Publisher	Allied Publishers

Conference	International Conference on Smart Materials, Structures and Systems, Bangalore, India
Period	7/07/99 → 10/07/99

Keywords

@inproceedings{581d6608fd924e8da7bda25fdeddde05,

title = "Developing MEMS technology: choosing the options to meet requirements",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PJ French",

year = "1999",

language = "Undefined/Unknown",

isbn = "81-7023-958-3",

publisher = "Allied Publishers",

pages = "182--189",

editor = "{PD Mangalgiri} and {AR Upadhya} and {A Selvarajan}",

booktitle = "Proceedings",

note = "International Conference on Smart Materials, Structures and Systems, Bangalore, India ; Conference date: 07-07-1999 Through 10-07-1999",

}

TY - GEN

T1 - Developing MEMS technology: choosing the options to meet requirements

AU - French, PJ

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 81-7023-958-3

SP - 182

EP - 189

BT - Proceedings

A2 - PD Mangalgiri, null

A2 - AR Upadhya, null

A2 - A Selvarajan, null

PB - Allied Publishers

CY - New Delhi

T2 - International Conference on Smart Materials, Structures and Systems, Bangalore, India

Y2 - 7 July 1999 through 10 July 1999

ER -