Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy

Alicia Gomez; P. Prieto; J. Bueno; S. Doyle; P Barry; A. Bideaud; N. Llombart Juan; D. Granados; J. L. Costa-Kramer; J. Martin-Pintado; J. J. A. Baselmans

doi:10.1007/s10909-016-1517-9

Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy

Alicia Gomez, P. Prieto, J. Bueno, S. Doyle, P Barry, A. Bideaud, N. Llombart Juan, D. Granados, J. L. Costa-Kramer, J. Martin-Pintado, J. J. A. Baselmans

Tera-Hertz Sensing

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.

Original language	English
Pages (from-to)	148-153
Number of pages	6
Journal	Low Temperature Physics
Volume	184
Issue number	1
DOIs	https://doi.org/10.1007/s10909-016-1517-9
Publication status	Published - 2016

Keywords

Lumped element
Kinetic inductance detector
Nanofabrication

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10.1007/s10909-016-1517-9

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title = "Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy",

abstract = "We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.",

keywords = "Lumped element, Kinetic inductance detector, Nanofabrication",

author = "Alicia Gomez and P. Prieto and J. Bueno and S. Doyle and P Barry and A. Bideaud and {Llombart Juan}, N. and D. Granados and Costa-Kramer, {J. L.} and J. Martin-Pintado and Baselmans, {J. J. A.}",

year = "2016",

doi = "10.1007/s10909-016-1517-9",

language = "English",

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TY - JOUR

T1 - Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy

AU - Gomez, Alicia

AU - Prieto, P.

AU - Bueno, J.

AU - Doyle, S.

AU - Barry, P

AU - Bideaud, A.

AU - Llombart Juan, N.

AU - Granados, D.

AU - Costa-Kramer, J. L.

AU - Martin-Pintado, J.

AU - Baselmans, J. J. A.

PY - 2016

Y1 - 2016

N2 - We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.

AB - We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.

KW - Lumped element

KW - Kinetic inductance detector

KW - Nanofabrication

U2 - 10.1007/s10909-016-1517-9

DO - 10.1007/s10909-016-1517-9

M3 - Article

SN - 1063-777X

VL - 184

SP - 148

EP - 153

JO - Low Temperature Physics

JF - Low Temperature Physics

IS - 1

ER -

Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy

Abstract

Keywords

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