Device, system and method for the measurement of a vapor transmission rate through a film of permeable material

Q Li (Inventor), JFL Goosen (Inventor), MCM van de Sanden (Inventor)

Research output: Patent

Abstract

The invention relates to a vapor transmission rate measurement device (102), comprising a pressure sensor (110) and a chamber (106) with a chamber volume V, the chamber (106) having an opening (114) with a surface area A, the opening (114) being arranged to be spanned by a film (112) of permeable sample material. The vapor transmission rate measurement device (102) is arranged for determining an indication of the vapor transmission rate for the film (112) permeated by a vapor (116), based on at least one measurement by the pressure sensor (110) of a pressure P within the chamber (106). A ratio R between the chamber volume V and the surface area A is smaller that 10 -5 m. The pressure sensor (110) may for example have a microelectromechanical or nanoelectromechanical resonator (202), or a microelectronic or nanoelectronic Pirani gauge (302).
Original languageEnglish
Patent numberNL2004419
Priority date17/03/10
Publication statusPublished - 2010

Keywords

  • other public output
  • Octrooi
  • Geen VSNU-classificatie

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