Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]

MR van den Berg, LK Nanver, Q Ren, CCG Visser, RJM Mallee, JW Slotboom

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Keywords

@inproceedings{76aff214de0141e0976bfaa509485be8,

title = "Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van den Berg}, MR and LK Nanver and Q Ren and CCG Visser and RJM Mallee and JW Slotboom",

year = "1998",

language = "Undefined/Unknown",

pages = "27--30",

booktitle = "Proceedings",

}