Effect of Laser Deflection on Resonant Cantilever Sensors

CK Yang; A Bossche; PJ French; H Sadeghian Marnani; JFL Goosen; F van Keulen; K Babaei Gavan; HSJ van der Zant; EWJM van der Drift

Effect of Laser Deflection on Resonant Cantilever Sensors

CK Yang, A Bossche, PJ French, H Sadeghian Marnani, JFL Goosen, F van Keulen, K Babaei Gavan, HSJ van der Zant, EWJM van der Drift

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

3 Citations (Scopus)

Abstract

Laser beam deflection is a well-known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the cantilevers and affect the measurement accuracy. In this work we showed that the joule heating of the laser, besides other extrinsic effects such as surface contamination, can cause a significant amount of shift in the resonator. The longer and softer the cantilever is, the more significant the effect. We suggest that the laser effects on the resonant response of sensors have to be taken into account.

Original language	English
Title of host publication	Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand
Editors	Makhopadhyay, S.C.
Publisher	IEEE Society
Pages	869-872
Number of pages	4
ISBN (Print)	978-1-4244-5335-1
Publication status	Published - 2009
Event	IEEE Sensors 2009 Conference - Christchurch, New Zealand Duration: 25 Oct 2009 → 28 Oct 2009

Conference

Conference	IEEE Sensors 2009 Conference
Country/Territory	New Zealand
City	Christchurch
Period	25/10/09 → 28/10/09

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

Yang, CK., Bossche, A., French, PJ., Sadeghian Marnani, H., Goosen, JFL., van Keulen, F., Babaei Gavan, K., van der Zant, HSJ., & van der Drift, EWJM. (2009). Effect of Laser Deflection on Resonant Cantilever Sensors. In Makhopadhyay, S.C. (Ed.), Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand (pp. 869-872). IEEE Society.

@inproceedings{e1e8115454e94defb16ec2c0d0f65212,

title = "Effect of Laser Deflection on Resonant Cantilever Sensors",

abstract = "Laser beam deflection is a well-known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the cantilevers and affect the measurement accuracy. In this work we showed that the joule heating of the laser, besides other extrinsic effects such as surface contamination, can cause a significant amount of shift in the resonator. The longer and softer the cantilever is, the more significant the effect. We suggest that the laser effects on the resonant response of sensors have to be taken into account.",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "CK Yang and A Bossche and PJ French and {Sadeghian Marnani}, H and JFL Goosen and {van Keulen}, F and {Babaei Gavan}, K and {van der Zant}, HSJ and {van der Drift}, EWJM",

year = "2009",

language = "English",

isbn = "978-1-4244-5335-1",

pages = "869--872",

editor = "{Makhopadhyay, S.C.}",

booktitle = "Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand",

publisher = "IEEE Society",

note = "IEEE Sensors 2009 Conference ; Conference date: 25-10-2009 Through 28-10-2009",

}

Yang, CK , Bossche, A , French, PJ, Sadeghian Marnani, H, Goosen, JFL , van Keulen, F, Babaei Gavan, K, van der Zant, HSJ & van der Drift, EWJM 2009, Effect of Laser Deflection on Resonant Cantilever Sensors. in Makhopadhyay, S.C. (ed.), Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand. IEEE Society, pp. 869-872, IEEE Sensors 2009 Conference, Christchurch, New Zealand, 25/10/09.

TY - GEN

T1 - Effect of Laser Deflection on Resonant Cantilever Sensors

AU - Yang, CK

AU - Bossche, A

AU - French, PJ

AU - Sadeghian Marnani, H

AU - Goosen, JFL

AU - van Keulen, F

AU - Babaei Gavan, K

AU - van der Zant, HSJ

AU - van der Drift, EWJM

PY - 2009

Y1 - 2009

N2 - Laser beam deflection is a well-known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the cantilevers and affect the measurement accuracy. In this work we showed that the joule heating of the laser, besides other extrinsic effects such as surface contamination, can cause a significant amount of shift in the resonator. The longer and softer the cantilever is, the more significant the effect. We suggest that the laser effects on the resonant response of sensors have to be taken into account.

AB - Laser beam deflection is a well-known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the cantilevers and affect the measurement accuracy. In this work we showed that the joule heating of the laser, besides other extrinsic effects such as surface contamination, can cause a significant amount of shift in the resonator. The longer and softer the cantilever is, the more significant the effect. We suggest that the laser effects on the resonant response of sensors have to be taken into account.

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-5335-1

SP - 869

EP - 872

BT - Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand

A2 - Makhopadhyay, S.C., null

PB - IEEE Society

T2 - IEEE Sensors 2009 Conference

Y2 - 25 October 2009 through 28 October 2009

ER -

Effect of Laser Deflection on Resonant Cantilever Sensors

Abstract

Conference

Keywords

Fingerprint

Cite this