@inproceedings{21aa3d8173ec402aa81dde98018ddfab,
title = "Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{Babaei Gavan}, K and {van der Heijden}, J and {van der Drift}, EWJM and {van der Zant}, HSJ",
year = "2009",
language = "Undefined/Unknown",
isbn = "978-1-4244-4629-2",
publisher = "IEEE",
pages = "380--384",
editor = "{Brugger, J. Rooij, N.F.}, {Hao, Y.}",
booktitle = "Proceedings of the 2009 4th IEEE International",
address = "United States",
note = "Conference on Nano/Micro Engineered and Molecular Systems ; Conference date: 05-01-2009 Through 08-01-2009",
}