@inproceedings{162d77214acc4207b8291eb6dee4ebd5,
title = "Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "PM Sarro and D Brida and {van der Vlist}, W and G Pignatel and S Brida",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-76699-02-X",
publisher = "Delft University of Technology",
pages = "389--392",
editor = "{M Bartek}",
booktitle = "Eurosensors XIII: proceedings [CD-ROM]",
address = "Netherlands",
note = "13th European Conference on Solid-State Transducers, The Hague ; Conference date: 12-09-1999 Through 15-09-1999",
}