Effect of undercut on the resonant behaviour of silicon nitride cantilevers

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	035003-1-035003-8
Journal	Journal of Micromechanics and Microengineering
Volume	19
Issue number	3
Publication status	Published - 2009

Keywords

@article{3e5862170000410f956a5f0c83eff6e9,

title = "Effect of undercut on the resonant behaviour of silicon nitride cantilevers",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{Babaei Gavan}, K and {van der Drift}, EWJM and WJ Venstra and MR Zuiddam and {van der Zant}, HSJ",

year = "2009",

language = "Undefined/Unknown",

volume = "19",

pages = "035003--1--035003--8",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "3",

}

TY - JOUR

T1 - Effect of undercut on the resonant behaviour of silicon nitride cantilevers

AU - Babaei Gavan, K

AU - van der Drift, EWJM

AU - Venstra, WJ

AU - Zuiddam, MR

AU - van der Zant, HSJ

PY - 2009

Y1 - 2009

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 19

SP - 035003-1-035003-8

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 3

ER -